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Electronic Materials and Gases Analysis

The International Technology Roadmap for Semiconductors ITRS details the gas purity requirements for various wafer fabrication processes on their web-site www. Oxygenated contaminants such as water vapor in the materials used and in the wafer environment are primary causes of defects and process variations that compromise yield.


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Since even trace levels of water in the process gases can seriously decrease device performance, analytical techniques must be capable of detecting water vapor from ppmv concentrations down to the low and even sub-ppbv range. This chapter focuses on technologies that not only provide high sensitivity for H 2 O but can also be applied to a wide range of specialty gases. They can be broadly categorized into sensor and spectroscopic-based approaches.

Aspects related to water standards and calibration, are also discussed. Local Download. Gas analysis, gas spectroscopy, Impurity analysis. Show related SlideShares at end.

Trace Analysis of Specialty and Electronic Gases

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- Trace Analysis of Specialty and Electronic Gases

Trace analysis of specialty and electronic gases pdf 1. Trace Analysis of Specialty and Electronic Gases 2. Publisher : Wiley Release Date : 3.


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  7. Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species.

    Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental techniques available for specialty and electronic gas analysis.

    About the Author

    Moreover, the book details the advantages and disadvantages of each technique, steering readers away from common pitfalls. Featuring contributions from leading analytical and industrial chemists, Trace Analysis of Specialty and Electronic Gases covers a wide range of practical industrial applications.

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    There are also two appendices offering information on fittings and material compatibility. With its thorough review of the literature and step-by-step guidance, Trace Analysis of Specialty and Electronic Gases enables researchers to take full advantage of the latest advances in gas analysis. Although the book's focus is the semiconductor and electronics industry, analytical chemists in other industries facing challenges with such issues as detection selectivity and sensitivity, matrix gas interference, and materials compatibility will also discover plenty of useful analytical approaches and techniques.